Electron lithography enables sub-100-nanometer patterning of a fully water-based hydrogel resist.

Unlike traditional methods, NIL simplifies the process by eliminating complex optics, making it ideal for semiconductor memory applications with resolutions better than 10 nm. However, NIL faces ...

The ability to create intricate, nano-scale patterns is at the heart of nanotechnology, and lithography techniques are the tools that make this possible. From photolithography to FIB, each technique ...

TOKYO--(BUSINESS WIRE)--Dai Nippon Printing Co., Ltd. (DNP, TOKYO: 7912) has successfully achieved the fine pattern resolution required for photomasks for logic semiconductors of the beyond 2nm (nm: ...

In semiconductor manufacturing, lithography is a critical process that uses light to transfer intricate circuit (IC) patterns onto a silicon wafer. This process enables the creation of tiny ...

Fig. 1 The lithography process. The projection lithography system. The advancement of semiconductor manufacturing is a key driver of electronic device innovations. As Moore’s Law progresses, ...

Soft lithography is a family of non-photolithographic techniques used for fabricating micro- and nanostructures using elastomeric stamps, molds, and conformable photomasks. Unlike conventional ...

Soft lithography is a fabrication technique used to create micro- and nanoscale patterns. Developed in the early 1990s by George M. Whitesides and colleagues, it simplifies pattern formation by using ...

Lithographers have always faced tradeoffs between speed and flexibility. Steppers are very good at printing hundreds or thousands of identical features onto hundreds or thousands of wafers. They are ...

What Is Electron Beam Lithography? Electron beam lithography (EBL) is a technique for creating high-resolution patterns on a semiconductor substrate by directing a beam of electrons to selectively ...